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Technical parameters

AC and DC characteristics
Closed-loop Bandwidth~300 Hz (typical)
ResolutionSub-nanometer (software-controlled)
Settling Time≤2.4 ms
Environment and package
Temporal Stability<15 nm RMS drift over 12 hours (with compensation)
Other
Actuation TechnologyElectromagnetic, contactless
Actuator Count91 electromagnetic actuators
Hysteresis<0.1%
Linearity>99.5%
Max Stroke (PV)≥50 µm
Surface Quality (RMS)<7 nm RMS (standard), <4 nm RMS (optional)
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